This book constitutes the proceedings of the 5th International Workshop on Design, Modeling, and Evaluation of Cyber Physical Systems, CyPhy 2015, held as part of ESWeek 2015, in Amsterdam, The Netherlands, in October 2015. The 10 papers presented in this volume were carefully reviewed and selected from 13 submissions. They broadly interpret, from a diverse set of disciplines, the modeling, simulation, and evaluation of cyber-physical systems.