Principles of microelectromechanical systems
Başlık:
Principles of microelectromechanical systems
Yazar:
Lee, Ki Bang, author.
ISBN:
9780470649671
Yazar:
Fiziksel Niteleme:
1 PDF (xii, 667 pages).
İçindekiler:
Microfabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors.
Konu Başlığı:
Tür:
Yazar Ek Girişi:
Elektronik Erişim:
Abstract with links to resource http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438