Micromechanics and MEMS : classic and seminal papers to 1990 için kapak resmi
Micromechanics and MEMS : classic and seminal papers to 1990
Başlık:
Micromechanics and MEMS : classic and seminal papers to 1990
Yazar:
Trimmer, W.
ISBN:
9780470545263
Fiziksel Niteleme:
1 PDF (xv, 701 pages) : illustrations.
Genel Not:
"A selected reprint volume."
İçindekiler:
Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.
Özet:
Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.
Yazar Ek Girişi:
Elektronik Erişim:
Abstract with links to resource http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520