Micro and Nano Fabrication Tools and Processes
Başlık:
Micro and Nano Fabrication Tools and Processes
Yazar:
Gatzen, Hans H. author.
ISBN:
9783662443958
Yazar:
Fiziksel Niteleme:
XXVI, 519 p. 357 illus., 54 illus. in color. online resource.
İçindekiler:
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
Özet:
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Ek Kurum Yazar:
Elektronik Erişim:
http://dx.doi.org/10.1007/978-3-662-44395-8