This book describes the design of relay-based circuit systems from device fabrication to circuit micro-architectures. This book is ideal for both device engineers as well as circuit system designers and highlights the importance of co-design across design hierarchies when optimizing system performance (in this case, energy-efficiency). This book is ideal for researchers and engineers focused on semiconductors, integrated circuits, and energy efficient electronics. This book also: ·         Covers microsystem fabrication, MEMS device design, circuit design, circuit micro-architecture, and CAD ·         Describes work previously done in the field and also lays the groundwork and criteria for future energy-efficient device and system design ·         Maximizes reader insights into the design and modeling of micro-relay, micro-relay reliability, integrated circuit design with micro-relays, and more.