Micromechanics and MEMS : classic and seminal papers to 1990
tarafından
Trimmer, W.
Başlık
:
Micromechanics and MEMS : classic and seminal papers to 1990
Yazar
:
Trimmer, W.
ISBN
:
9780470545263
Fiziksel Niteleme
:
1 PDF (xv, 701 pages) : illustrations.
Genel Not
:
"A selected reprint volume."
İçindekiler
:
Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.
Özet
:
Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.
Konu Başlığı
:
Microelectronics.
Microelectromechanical systems.
Actuators.
Tür
:
Electronic books.
Yazar Ek Girişi
:
Trimmer, W.
Ek Kurum Yazar
:
John Wiley & Sons,
Institute of Electrical and Electronics Engineers.
IEEE Xplore (Online service),
Elektronik Erişim
:
Materyal Türü | Barkod | Yer Numarası | Durumu/İade Tarihi |
---|
Electronic Book | 15302-1001 | TK7874 .M4876 1997 EB | IEEE |