Micromechanics and MEMS : classic and seminal papers to 1990
tarafından
 
Trimmer, W.

Başlık
Micromechanics and MEMS : classic and seminal papers to 1990

Yazar
Trimmer, W.

ISBN
9780470545263

Fiziksel Niteleme
1 PDF (xv, 701 pages) : illustrations.

Genel Not
"A selected reprint volume."

İçindekiler
Early papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.

Özet
Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.

Konu Başlığı
Microelectronics.
 
Microelectromechanical systems.
 
Actuators.

Tür
Electronic books.

Yazar Ek Girişi
Trimmer, W.

Ek Kurum Yazar
John Wiley & Sons,
 
Institute of Electrical and Electronics Engineers.
 
IEEE Xplore (Online service),

Elektronik Erişim
Abstract with links to resource http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520


Materyal TürüBarkodYer NumarasıDurumu/İade Tarihi
Electronic Book15302-1001TK7874 .M4876 1997 EBIEEE